Protection and maintenance of vacuum coating machine?

Protection and maintenance of vacuum coating machine?

1, vacuum coating machine, each end more than 200 coating procedures, should be a clean operation room. Saturated solution method is: use caustic soda (NaOH) repeat wipes vacuum chamber wall, (pay attention to the body skin can't directly touch the caustic soda solution, avoid burns) went up the intention is to make the plating film is expected to aluminum (AL) and onset of NaOH, reaction after falling film layer, and release the hydrogen. Reoccupy clear water clean vacuum chamber and cloth stained with gasoline cleaning fine dirt in the valve.
(2, when the thick smoke pump plunger pump, vane pump) after operation one month (binary) of the dry season, need to change the new oil. Way is: screw bolt open oil, put away the old oil, then pump a few seconds, make the old oil inside the pump completely discharged. Screw bolt playback oil, to participate in the new oil to the rated quantity (oil endoscopic survey). Have used for more than six months, when the oil change oil cover should be opened, a cloth to wipe clean the dirt in the cabinet.
3, scattered pump were used more than 6 months, pumping speed significantly slower, or improper operation, filling the air and down joint pipes, electric plate, will be squeezed out of the primary nozzle, use gasoline first pump cavity and pump gallbladder clean again, use detergent water clean again, and then completely clean with clear water clean, moisture evaporation dry in the future, packed pump, to participate in the new distributed pump oil, and put back to the body, connected pipes, pack good furnace set, can from the boot. In before starting from scratch, attention should be paid to leak detection work. Way is: keep pump, close the door, a few minutes later, the investigation spread some vacuum pump is reach 6 x10 palmer, or for leak detection. Check the connection place is o-ring seal, or crush seal ring. Eliminate leak dangerous rear can heating, or dispersed oil pump will burn ring, can't enter the operation conditions.