How to maintain the vacuum coating equipment?

How to maintain the vacuum coating equipment?

How to maintain the vacuum coating equipment? Vacuum coating equipment more than 200 times in the plating system should be to thoroughly clean the vacuum chamber, swab repeatedly USES the cleaning solution (caustic soda solution) of the vacuum chamber wall.
Note: caustic soda solution to the body skin burns effect of people, can not directly contact.
1. The equipment repairing and can't use a heavy hammer percussion, can't cut seal groove and the sealing surface.
2. To check each part of the backwater, often at work should ensure that the parts have plenty of water.
3. The application of equipment vibration may arise at work, makes some bolts to loosen, so be sure to check regularly.
4. Equipment at work, the operation staff can not for a long time to leave, equipment at work, should pay attention to the various parts of instrument display case and the sound of the pump, if abnormal shall timely find out the problem.
5. When stop using equipment, should be the gas in the vacuum chamber to fit, if must be put on hold for a long time, need into protective gas and water-cooled circulating water to empty the equipment.