Vacuum coating machine vacuum measurement of non-uniform environment

Vacuum coating machine vacuum measurement of non-uniform environment

Vacuum coating machines, vacuum coating machines in practical systems, there is a source to pump gas from the air, and some of these air flow through the drain hole injection, but also some flow effects caused due to various outlet. Not only can a variety of vacuum pumping gas, and vacuum gauge and clean surfaces also have the role of adsorbed gas. Therefore, the actual vacuum system is generally non-uniform airflow distribution. The gas flows through the tubular conduit pipe bunching will be led into the container flow distribution is more uniform. Rarefied air flow vacuum system affects the non-uniform distribution, has been the subject of detailed study in recent years, and these findings are also promoting the development of accurate measurement of gas pressure technology.
In general, we discuss pressure measurement, virtually has assumed two conditions:
① In an envelope, independent of their density and air flow direction and position of the unit solid angle, in a given spatial point there is only one pressure, the pressure independent of the pressure at this point in the regulation of the orientation. That airflow isotropic Yun assumptions.
② is in all parts of the system at the same temperature, the gas pressure means that the referenced pressure this temperature, i.e. an isothermal assumption.