Vacuum coating machine uneven deposition

Vacuum coating machine uneven deposition
With the development of coating technology, all kinds of vacuum coating machine also gradually appear, either vacuum coating machine, the uniformity of the film will be influenced by some factors. Now, we will by magnetic sputtering vacuum coating machine for the analysis of film forming uneven factor.
Uneven coating machine extraction can affect coating uniformity. Substrate clean is very important. Before making vacuum coating to the substrate surface is clean, achieve the workpiece to the purpose of the oil, decontamination and dehydration. Substrate surface contamination from parts in processing, transportation, etc in the process of all kinds of dirt, grease, polishing paste, perspiration, etc., in damp environment, easy oxidation of substrate surface, the formation of oxide film adsorbed gas. For these dirt, can use to clean oil or chemical methods. Clean substrate don't directly on the outside, the need to use a closed container storage, reduce contamination. Coating deposited indoor is, so to clean coating indoor, baking degassing, and place the machine in a clean environment. Pay attention to the diffusion pump oil. Coating raw materials are many, such as resin, silicone, silicone hydrochloric acid, polymer and so on, auxiliary materials, formulation is different than the column, thin film is also different.
Above is the vacuum coating machine film-forming uneven factor.