1. The thickness uniformity, which can also be interpreted as roughness, watching it on the scale of the optical thin film is 1/10 of a wavelength as a unit, is about 100 a, vacuum coating uniformity is good, easy to control the roughness 1/10 of the visible light wavelength range, that is for the optical properties of thin film, vacuum coating without any obstacles.But if it is refers to the uniformity of atomic scale layer, that is to achieve 10 a 1 a smooth, even under the specific control factors according to different coating gives a detailed explanation.
2. The uniformity chemically: that is to say in the film, compound atomic elements will be because of the scale is too small and it is easy to produce non-uniform features, SiTiO3 film, if the coating process is not scientific, so on the surface of the component is not actual SiTiO3, and may be in proportion to the other, the plating film is not want the chemical composition of the membrane, it is also the technical content of vacuum coating.The specific factors are given below.
3. The uniformity of the lattice degree of order: this determines the film is a single crystal, polycrystalline, amorphous, is the hot issue in the vacuum coating technology
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