The chemical constituents of the pvd vacuum coating machine
1. The thickness uniformity, which can also be interpreted as roughness, watching it on the scale of the optical thin film is 1/10 of a wavelength as a unit, is about 100 a, vacuum coating uniformity is good, easy to control the roughness 1/10 of the visible light wavelength range, that is for the optical properties of thin film, vacuum coating without any obstacles.But if it is refers to the uniformity of atomic scale layer, that is to achieve 10 a 1 a smooth, even under the specific control factors according to different coating gives a detailed explanation.
2. The uniformity chemically: that is to say in the film, compound atomic elements will be because of the scale is too small and it is easy to produce non-uniform features, SiTiO3 film, if the coating process is not scientific, so on the surface of the component is not actual SiTiO3, and may be in proportion to the other, the plating film is not want the chemical composition of the membrane, it is also the technical content of vacuum coating.The specific factors are given below.
3. The uniformity of the lattice degree of order: this determines the film is a single crystal, polycrystalline, amorphous, is the hot issue in the vacuum coating technology
Vacuum coating machine uneven depositionWith the development of coating technology, all kinds of vacuum coating machine also gradually appear, either vacuum coating machine, the uniformity of the film will be influenced by some factors. Now, we will by magnetic sputtering vacuum coating machine for the analysis of film forming uneven factor.Uneven coating machine extraction can affect coating uniformity. Substrate clean is very important. Before making vacuum coating to the substrate surface is clean, achieve the workpiece to the purpose of the oil, decontamination and dehydration. Substrate surface contamination from parts in processing, transportation, etc in the process of all kinds of dirt, grease, polishing paste, perspiration, etc., in damp environment, easy oxidation of substrate surface, the formation of oxide film adsorbed gas. For these dirt, can use to clean oil or chemical methods. Clean substrate don't directly on the outside, the need to use a closed container storage, reduce contamination. Coating deposited indoor is, so to clean coating indoor, baking degassing, and place the machine in a clean environment. Pay attention to the diffusion pump oil. Coating raw materials are many, such as resin, silicone, silicone hydrochloric acid, polymer and so on, auxiliary materials, formulation is different than the column, thin film is also different.
Above is the vacuum coating machine film-forming uneven factor.
