Magnetron sputtering vacuum coating machine system is an updated pvd sputtering coating technology with advantages of high sputtering speed, lower temperature,Operational principle:
Sputtering is physical phenomenon that electron collide with argon atoms and turn into Argon ions and electron ions when electron accelerated flying towards the substrate under the electric field effect. Thereafter, the argon ions accelerated bombard target in the electric field, that will sputter a large number of target atoms, neutral target atoms (or molecules) depositing on the surface of the substrate forming a layer or multi-layers decorative and functional film.
Equipment configuration:
Structure type: vertical type or Horizontal type
Chamber type: single door or double doors
Power type: DC or Mid-frequency
Application field:
It can be widely used in high-grade decorative and functional films for watch, glasses , communications, electronics, machinery, decoration and transportation aviation and other industries.
Main feature:
1, Higher deposition rate, less temperature rise, better avoid target destroyed and polluted
2, High-energy that released though the sputtering make the film density and adhesion improved significantly;
3, Touch screen + PLC, to achieve automatic control, automatic / manual switch anytime;
4, The coating chamber with a high volume, big loading capacity, high production efficiency.
5, The work-piece rotation frame with public structure can be set to automatically reversing, it can ensure the coating uniformity;
6, The whole configuration is reasonable, high pumping rate, low noise, low power consumption;
7, This device deposited film in density, uniformity, purity, hardness, etc. are able to meet customer requirements
Basic Outfit :
1, The coating chamber, valves, pipes are made of stainless steel, vacuum chamber diameter range from Φ500mm to Φ2000mm ;
2, the vacuum system including: mechanical pumps, rotary vane pumps, roots pumps and oil diffusion pump with cold trap or molecular pumps;
3, The coating system uses 2 to 10 sets of planar targets or cylindrical targets with 2 to 10 DC or frequency power source;
4, Auxiliary pumping system uses Low temperature steam trap
5,Inflatable system uses 1 to 4 gas flow meter and flow control (display) instrument control;
6, Equipped with Sound and light alarm device for the electronic control system when it happen circuit overload, the shortage of the water, cut-off the gas.
7, The control system (touch screen + PLC) can real-time display detailed parameters, automatic control the entire production process, automatic storage process parameters.
8, The model of the device equipped with high-power systems and ionization source bias assisted deposition coating;
9, Multiple sets of target source for customers choosing.
Sputtering is physical phenomenon that electron collide with argon atoms and turn into Argon ions and electron ions when electron accelerated flying towards the substrate under the electric field effect. Thereafter, the argon ions accelerated bombard target in the electric field, that will sputter a large number of target atoms, neutral target atoms (or molecules) depositing on the surface of the substrate forming a layer or multi-layers decorative and functional film.
Equipment configuration:
Structure type: vertical type or Horizontal type
Chamber type: single door or double doors
Power type: DC or Mid-frequency
Application field:
It can be widely used in high-grade decorative and functional films for watch, glasses , communications, electronics, machinery, decoration and transportation aviation and other industries.
Main feature:
1, Higher deposition rate, less temperature rise, better avoid target destroyed and polluted
2, High-energy that released though the sputtering make the film density and adhesion improved significantly;
3, Touch screen + PLC, to achieve automatic control, automatic / manual switch anytime;
4, The coating chamber with a high volume, big loading capacity, high production efficiency.
5, The work-piece rotation frame with public structure can be set to automatically reversing, it can ensure the coating uniformity;
6, The whole configuration is reasonable, high pumping rate, low noise, low power consumption;
7, This device deposited film in density, uniformity, purity, hardness, etc. are able to meet customer requirements
Basic Outfit :
1, The coating chamber, valves, pipes are made of stainless steel, vacuum chamber diameter range from Φ500mm to Φ2000mm ;
2, the vacuum system including: mechanical pumps, rotary vane pumps, roots pumps and oil diffusion pump with cold trap or molecular pumps;
3, The coating system uses 2 to 10 sets of planar targets or cylindrical targets with 2 to 10 DC or frequency power source;
4, Auxiliary pumping system uses Low temperature steam trap
5,Inflatable system uses 1 to 4 gas flow meter and flow control (display) instrument control;
6, Equipped with Sound and light alarm device for the electronic control system when it happen circuit overload, the shortage of the water, cut-off the gas.
7, The control system (touch screen + PLC) can real-time display detailed parameters, automatic control the entire production process, automatic storage process parameters.
8, The model of the device equipped with high-power systems and ionization source bias assisted deposition coating;
9, Multiple sets of target source for customers choosing.
没有评论:
发表评论